Browsing Innovation in Manufacturing Systems and Technology (IMST) by Subject "ablation"

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    • Femtosecond laser processing of crystalline silicon 

      Tran, D. V.; Lam, Yee Cheong; Zheng, H. Y.; Murukeshan, V. M.; Chai, J.C.; e.a. (2005-01)
      This paper reports the surface morphologies and ablation of crystalline silicon wafers irradiated by infra-red 775 nm Ti:sapphire femtosecond laser. The effects of energy fluences (below and above single-pulse modification) ...