Browsing Innovation in Manufacturing Systems and Technology (IMST) by Subject "atomic force microscope"
Now showing items 1-3 of 3
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Application of Stereo Imaging to Atomic Force Microscopy
(2002-01)Metrological data from sample surfaces can be obtained by using a variety of profilometry methods. Atomic Force Microscopy (AFM), which relies on contact inter-atomic forces to extract topographical images of a sample, ... -
Imaging at the Nano-scale: State of the Art and Advanced Techniques
(2003-01)Surface characteristics such as topography and critical dimensions serve as important indicators of product quality and manufacturing process performance especially at the micrometer and the nanometer scales. This paper ... -
On Dual Actuation in Atomic Force Microscopes
(2004-01)In this paper, the problem of dual actuation in the atomic force microscope (AFM) is analyzed. The use of two actuators to balance the trade-off between bandwidth, range, and precision has been recently extended to ...