Focused Ion Beam Fabrication

Author(s)
Melngailis, John; Lezec, Henri J.; Shepard, Mark I.; Musil, Christian R.; Murguia, James E.; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains reports on eight research projects.
Date issued
1988-01-01
URI
http://hdl.handle.net/1721.1/57076
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_131_01_01s_03
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 131
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