| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Goodberlet, James G. | en_US |
| dc.contributor.author | Ferrera, Juan | en_US |
| dc.contributor.author | Mondol, Mark K. | en_US |
| dc.contributor.author | Carter, David J. | en_US |
| dc.contributor.author | Carter, James M. | en_US |
| dc.contributor.author | Daley, James M. | en_US |
| dc.contributor.author | Lim, Michael H. Y. | en_US |
| dc.contributor.author | Moon, Euclid E. | en_US |
| dc.contributor.author | Schweizer, Mark R. | en_US |
| dc.contributor.author | Mao, Wendy | en_US |
| dc.contributor.author | Murphy, Edward R. | en_US |
| dc.contributor.author | Yang, Isabel Y. | en_US |
| dc.contributor.author | Yuan, Jing | en_US |
| dc.contributor.author | Everett, Patrick N. | en_US |
| dc.contributor.author | Farhoud, Maya S. | en_US |
| dc.contributor.author | Fleming, Robert C., Jr. | en_US |
| dc.contributor.author | Savas, Timothy A. | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Jackson, Keith M. | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Lochtefeld, Anthony | en_US |
| dc.contributor.author | Chandrakasan, Anantha P. | en_US |
| dc.contributor.author | Meinhold, Mitchell W. | en_US |
| dc.contributor.author | Sokolinski, Ilia | en_US |
| dc.contributor.author | Melloch, Michael R. | en_US |
| dc.contributor.author | Orlando, Terry P. | en_US |
| dc.contributor.author | Pepin, Anne | en_US |
| dc.contributor.author | Berman, David B. | en_US |
| dc.contributor.author | Ashoori, Raymond C. | en_US |
| dc.contributor.author | Foresi, James S. | en_US |
| dc.contributor.author | Villeneuve, Pierre R. | en_US |
| dc.contributor.author | Joannopoulos, John D. | en_US |
| dc.contributor.author | Kimerling, Lionel C. | en_US |
| dc.contributor.author | Damask, Jay N. | en_US |
| dc.contributor.author | Murphy, Thomas E. | en_US |
| dc.contributor.author | Haus, Hermann A. | en_US |
| dc.contributor.author | Kolodziejski, Leslie A. | en_US |
| dc.contributor.author | Porter, Jeanne M. | en_US |
| dc.contributor.author | Prentiss, Jane D. | en_US |
| dc.contributor.author | Sisson, Robert D. | en_US |
| dc.contributor.author | van Beek, Joost | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.contributor.author | Franke, Andrea E. | en_US |
| dc.date.accessioned | 2010-07-17T01:07:27Z | |
| dc.date.available | 2010-07-17T01:07:27Z | |
| dc.date.issued | 1996-01-01 to 1996-12-31 | en_US |
| dc.identifier | RLE_PR_139_01_02s_04 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57366 | |
| dc.description | Contains reports on twenty research projects and a list of publications. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program Grant DAAH04-95-1-0038 | en_US |
| dc.description.sponsorship | National Science Foundation Grant ECS-94-07078 | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation | en_US |
| dc.description.sponsorship | U.S. Army Research Office Grant DAAH04-95-1-0564 | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/Naval Air Systems Command Contract N00019-95-K-0131 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Contract NAS8-38249 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Grant NAGW-2003 | en_US |
| dc.description.sponsorship | IBM Corporation Contract 1622 | en_US |
| dc.description.sponsorship | National Science Foundation Graduate Fellowship | en_US |
| dc.description.sponsorship | U.S. Navy - Office of Naval Research Grant N00014-95-1-1297 | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAH04-94-G-0377 | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research Grant F49620-92-J-0064 | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research Grant F49620-95-1-0311 | en_US |
| dc.description.sponsorship | National Science Foundation Contract DMR 94-0034 | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research Contract F49620-96-0126 | en_US |
| dc.description.sponsorship | Harvard-Smithsonian Astrophysical Observatory Contract SV630304 | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration Grant NAG5-5105 | en_US |
| dc.description.sponsorship | Los Alamos National Laboratory Contract E57800017-9G | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1996 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Quantum-Effect Devices | en_US |
| dc.relation.ispartof | Nanostructures, Technology, Research, and Applications | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 139 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Nanostructures, Technology, Research, and Applications | en_US |
| dc.subject.other | NanoStructures Laboratory | en_US |
| dc.subject.other | Scanning-Electron-Beam Lithography | en_US |
| dc.subject.other | Spatial-Phase-Locked Electron-Beam Lithography | en_US |
| dc.subject.other | X-Ray Nanolithography | en_US |
| dc.subject.other | Improved Mask Technology for X-Ray Lithography | en_US |
| dc.subject.other | High-Precision Mask Alignment with Immunity to Overlayers | en_US |
| dc.subject.other | High-Precision Gapping System with Immunity to Overlayers | en_US |
| dc.subject.other | Interferometric Lithography | en_US |
| dc.subject.other | High-Performance Sub-100 nm MOSFETs using X-ray Lithography | en_US |
| dc.subject.other | Back-gated CMOS on SOI Active Substrates | en_US |
| dc.subject.other | Fabrication of T-gate Devices Using X-ray Lithography | en_US |
| dc.subject.other | Coulomb Charging Effects in Semiconductor Nanostructures | en_US |
| dc.subject.other | Coulomb Charging Tunneling in Semiconductor Nanostructures | en_US |
| dc.subject.other | Fabrication Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors | en_US |
| dc.subject.other | Transport Studies of Lateral Surface Superlattices in GaAs/AIGaAs Modulation Doped Field-Effect Transistors | en_US |
| dc.subject.other | Single-Electron Transistor Research | en_US |
| dc.subject.other | One-Dimensional Photonic Band Gap Devices in SOI Waveguides | en_US |
| dc.subject.other | Fabrication of Grating-Based Optical Filters | en_US |
| dc.subject.other | Integrated Optical Grating-Based Matched Filters for Fiber-Optic Communications | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-ray Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for X-ray Interferometry | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Spectroscopy | en_US |
| dc.subject.other | Submicrometer-Period Transmission Gratings for Atom-Beam Interferometry | en_US |
| dc.subject.other | Super-smooth X-ray Reflection Gratings | en_US |
| dc.subject.other | Transmission Gratings as UV-blocking Filters for Neutral Atom Imaging | en_US |
| dc.title | Nanostructures, Technology, Research, and Applications | en_US |
| dc.type | Technical Report | en_US |
