Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Author "Ariel, Nava"

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Strained Silicon on Silicon by Wafer Bonding and Layer Transfer from Relaxed SiGe Buffer

Isaacson, David M.; Taraschi, G.; Pitera, Arthur J.; Ariel, Nava; Fitzgerald, Eugene A.; e.a. (2005-01)

We report the creation of strained silicon on silicon (SSOS) substrate technology. The method uses a relaxed SiGe buffer as a template for inducing tensile strain in a Si layer, which is then bonded to another Si handle ...