Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Issue Date
Now showing items 1-20 of 122
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Magnetically-Assisted Statistical Assembly - a new heterogeneous integration technique
(2002-01)This paper presents a new technique for the monolithic heterogeneous integration of compound semiconductor devices with silicon integrated circuits, and establishes the theoretical foundation for a key element of the ... -
Processing, Structure, Properties, and Reliability of Metals for Microsystems
(2002-01)Research on the processing, structure, properties and reliability of metal films and metallic microdevice elements is reviewed. Recent research has demonstrated that inelastic deformation mechanisms of metallic films and ... -
Solid-shell element model of assumed through-thickness electric distribution for laminate composite piezoelectric structures
(2002-01)The eight-node solid-shell finite element models have been developed for the analysis of laminated composite pate/shell structures with piezoelectric actuators and sensors. To resolve the locking problems of the solid-shell ... -
Strained Ge channel p-type metal-oxide-semiconductor field-effect transistors grown on Siâ‚â‚‹xGex/Si virtual substrates
(2002-01)We have fabricated strained Ge channel p-type metal-oxide-semiconductor field-effect transistors (p-MOSFETs) on Si₀.₃Ge₀.₇ virtual substrates. The poor interface between silicon dioxide (SiO₂) and the Ge channel ... -
Methods for Calculating the Optical Band Structure of Photonic Composites
(2002-01)Lately, there has been an increasing interest in studying the propagation of electromagnetic waves in periodic dielectric structures (photonic crystals). Like the electron propagation in semiconductors, these structures ... -
Synthesis of Germanium Nanocrystals and its Possible Application in Memory Devices
(2002-01)A novel method of synthesizing and controlling the size of germanium nanocrystals was developed. A tri-layer structure comprising of a thin (~5nm) SiO₂ layer grown using rapid thermal oxidation (RTO), followed by a ... -
Metastable Intermediate in LixMnO₂ Layered to Spinel Phase Transition
(2002-01)Ab Initio calculations suggest that partially lithiated layered LixMnO₂ transforms to spinel in a two-stage process. In the first stage, a significant fraction of the Mn and Li ions rapidly occupy tetrahedral sites, forming ... -
Charge Storage Effect in a Trilayer Structure Comprising Germanium Nanocrystals
(2002-01)A metal-insulator-semiconductor (MIS) device with a trilayer insulator structure consisting of sputtered SiO₂ (~50nm)/evaporated pure germanium (Ge) layer (2.4nm)/rapid thermal oxide (~5nm) was fabricated on a p-type ... -
Research Summary: The Effect of Microstructure on the Macroscopic Response of Electroactive Systems
(2002-01)A framework to model the effect of the microstructural features and crystallographic anisotropy on the macroscopic response of electractive ceramics is described. The model accounts for mechanical, electric and concentration ... -
Mechanical Characterization of the Heat Affected Zone of Gold Wirebonds Using Nanoindentation
(2002-01)With increasing miniaturization in microelectronics the wirebonds used in IC packages are witnessing a thrust towards fine pitch wirebonding. To have a precise control over loop height of the wirebond for fine pitch ... -
Process development of silicon-silicon carbide hybrid structures for micro-engines (January 2002)
(2002-01)MEMS-based gas turbine engines are currently under development at MIT for use as a button-sized portable power generator or micro-aircraft propulsion sources. Power densities expected for the micro-engines require very ... -
Atomistic Simulations of Metallic Cluster Coalescence
(2002-01)A new computational method is introduced to investigate the stresses developed in the island-coalescence stage of polycrystalline film formation during deposition. The method uses molecular dynamics to examine the behavior ... -
Studies on Nano-Indentation of Polymeric Thin Films Using Finite Element Methods
(2002-01)In this paper, the numerical simulation for nano-indentation is performed to measure time-dependent behavior of polymeric films. The possibility to extract the relaxed shear modulus of the polymer is evaluated using a rigid ... -
Investigation of the Fundamental Reliability Unit for Cu Dual-Damascene Metallization
(2002-01)An investigation has been carried out to determine the fundamental reliability unit of copper dual-damascene metallization. Electromigration experiments have been carried out on straight via-to-via interconnects in the ... -
Glass Forming Ability in Pr-(Cu, Ni)-Al Alloys
(2002-01)Glass forming ability (GFA) in the Pr-rich Pr-(Cu, Ni)-Al alloys at or near the eutectic points was systematically studied. It was found that the GFA in the pseudo-ternary alloys of Pr-(Cu, Ni)-Al is higher than that of ... -
SiGeC Near Infrared Photodetectors
(2002-01)A near infrared waveguide photodetector in Si-based ternary Si₁−x−yGexCy alloy was demonstrated for 0.85~1.06 µm wavelength fiber-optic interconnection system applications. Two sets of detectors with active absorption ... -
SiGe-On-Insulator (SGOI) Technology and MOSFET Fabrication
(2002-01)In this work, we have developed two different fabrication processes for relaxed Si₁₋xGex-on-insulator (SGOI) substrates: (1) SGOI fabrication by etch-back approach, and (2) by "smart-cut" approach utilizing ... -
A Constitutive Model for the Mechanical Behavior of Single Crystal Silicon at Elevated Temperature
(2002-01)Silicon in single crystal form has been the material of choice for the first demonstration of the MIT microengine project. However, because it has a relatively low melting temperature, silicon is not an ideal material for ... -
Amorphous Metallic Glass as New High Power and Energy Density Anodes For Lithium Ion Rechargeable Batteries
(2002-01)We have investigated the use of aluminum based amorphous metallic glass as the anode in lithium ion rechargeable batteries. Amorphous metallic glasses have no long-range ordered microstructure; the atoms are less closely ... -
Computation and Simulation of the Effect of Microstructures on Material Properties
(2002-01)Methods for and computed results of including the physics and spatial attributes of microstructures are presented for a number of materials applications in devices. The research in our group includes applications of ...
