Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Author "Barkley, Edward"

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RM³ Processing for In-plane Optical Interconnects on Si-CMOS and the Impact of Topographic Features on Losses in Deposited Dielectric Waveguides

Barkley, Edward; Fonstad, Clifton G. Jr. (2004-01)

This paper describes recent progress in a continuing program to develop and apply RM³ (recess mounting with monolithic metallization) technologies for heterogeneous integration. Particular emphasis is placed on the ...