Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Author "Chang, Choon Wai"

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The Influence of Adjacent Segment on the Reliability of Cu Dual Damascene Interconnects

Chang, Choon Wai; Choi, Z.-S.; Thompson, Carl V.; Gan, C.L.; Pey, Kin Leong; e.a. (2005-01)

Three terminal â€˜dotted-I’ interconnect structures, with vias at both ends and an additional via in the middle, were tested under various test conditions. Mortalities (failures) were found in right segments with jL value ...