Browsing Advanced Materials for Micro- and Nano-Systems (AMMNS) by Author "Bernstein, R."

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Characterization and Modeling of Stress Evolution During Nickel Silicides Formation

Liew, K.P.; Li, Yi; Yeadon, Mark; Bernstein, R.; Thompson, Carl V. (2003-01)

An curvature measurement technique was used to characterize the stress evolution during reaction of a Ni film and a silicon substrate to form nickel silicide. Stress changes were measured at each stage of the silicide ...