GaN Based Nanomaterials Fabrication with Anodic Aluminium Oxide by MOCVD

Author(s)
Wang, Yadong; Sander, Melissa; Peng, Chen; Chua, Soo-Jin; Fonstad, Clifton G. Jr.
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Abstract
A highly self-ordered hexagonal array of cylindrical pores has been fabricated by anodizing a thin film of Al on substrate and subsequent growth of GaN and InGaN in these nanoholes has been performed. This AAO template-based synthesis method provides a low cost process to fabricate GaN-based nanomaterials fabrication.
Date issued
2003-01
URI
http://hdl.handle.net/1721.1/3664
Series/Report no.
Advanced Materials for Micro- and Nano-Systems (AMMNS);
Keywords
GaN-based nanomaterials fabrication, template synthesis, anodic porous alumina, AAO template, nitride nanowire arrays, anodic aluminium oxide template
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