Submicron Structures Technology and Research

Author(s)
Anderson, Erik H.; Carter, James M.; Chu, William; Komatsu, Kazu; Quek, Hui Meng; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains reports on sixteen research projects.
Date issued
1987-01
URI
http://hdl.handle.net/1721.1/57008
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_129_01
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129
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