| dc.contributor.author | Anderson, Erik H. | en_US |
| dc.contributor.author | Carter, James M. | en_US |
| dc.contributor.author | Chu, William | en_US |
| dc.contributor.author | Komatsu, Kazu | en_US |
| dc.contributor.author | Quek, Hui Meng | en_US |
| dc.contributor.author | Yen, Anthony T. | en_US |
| dc.contributor.author | Plotnik, Irving | en_US |
| dc.contributor.author | Schattenburg, Mark L. | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Akhtar, Salmon | en_US |
| dc.contributor.author | Ku, Yao C. | en_US |
| dc.contributor.author | Toth, Markus | en_US |
| dc.contributor.author | Porter, Mark | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Field, S. | en_US |
| dc.contributor.author | Kastner, Marc A. | en_US |
| dc.contributor.author | Licini, Jerome C. | en_US |
| dc.contributor.author | Meirav, Udi | en_US |
| dc.contributor.author | Park, Samuel L. | en_US |
| dc.contributor.author | Scott-Thomas, John H. F. | en_US |
| dc.contributor.author | Bagwell, Phillip F. | en_US |
| dc.contributor.author | Ismail, Khalid | en_US |
| dc.contributor.author | Orlando, Terry P. | en_US |
| dc.contributor.author | Shahidi, Ghavam G. | en_US |
| dc.contributor.author | Chou, Stephen Y. | en_US |
| dc.contributor.author | Ajuria, Sergio | en_US |
| dc.contributor.author | Atwater, Henry A. | en_US |
| dc.contributor.author | Floro, Jerrold A. | en_US |
| dc.contributor.author | Garrison, Stephen M. | en_US |
| dc.contributor.author | Palmer, Joyce E. | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Canizares, Claude R. | en_US |
| dc.date.accessioned | 2010-07-16T03:40:14Z | |
| dc.date.available | 2010-07-16T03:40:14Z | |
| dc.date.issued | 1987-01 | en_US |
| dc.identifier | RLE_PR_129_01 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57008 | |
| dc.description | Contains reports on sixteen research projects. | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAALO3-86-K-0002) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS 85-06565) | en_US |
| dc.description.sponsorship | Lawrence Livermore Laboratory (Subcontract 9459005) | en_US |
| dc.description.sponsorship | Semiconductor Research Corporation (Contract 86-05-080) | en_US |
| dc.description.sponsorship | Joint Services Electronics Program (Contract DAAG-29-83-K-0003) | en_US |
| dc.description.sponsorship | National Science Foundation (Grant ECS 85-03443) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Contract AFOSR-85-0376) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Contract AFOSR-85-0154) | en_US |
| dc.description.sponsorship | U.S. Air Force - Office of Scientific Research (Grant AFSOSR 85-0154) | en_US |
| dc.description.sponsorship | Exxon Foundation | en_US |
| dc.description.sponsorship | National Aeronautics and Space Administration (Grant NGL22-009-683) | en_US |
| dc.description.sponsorship | Collaboration with KMS Fusion, Inc. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1987 | en_US |
| dc.relation.ispartof | Submicron Structures Technology and Research | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 129 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Submicron Structures Technology | en_US |
| dc.subject.other | Submicron Structures Research | en_US |
| dc.subject.other | Submicron Structures Laboratory | en_US |
| dc.subject.other | Microfabrication at Linewidths of 0.1 μm and Below | en_US |
| dc.subject.other | Improved Mask Technology for X-Ray Lithography | en_US |
| dc.subject.other | Theoretical Analysis of the Lithography Process | en_US |
| dc.subject.other | Electronic Conduction in One-Dimensional Semiconductor Devices | en_US |
| dc.subject.other | Surface Superlattice Formation in Silicon Inversion Layers Using 0.2 μm Period Grating-Gate Field-Effect Transistors | en_US |
| dc.subject.other | Surface Superlattice Formation in III-V Field-Effect Transistors | en_US |
| dc.subject.other | Investigation of One-Dimensional Conductivity in Multiple, Parallel Inversion Lines | en_US |
| dc.subject.other | Electron Transport in MOSFETs in Si with Deep-Submicron Channel Lengths | en_US |
| dc.subject.other | Application of the Shubnikov-de Haas Oscillations in Characterization of Si MOSFETs | en_US |
| dc.subject.other | Application of the Shubnikov-de Haas Oscillations in Characterization of GaAs MODFETs | en_US |
| dc.subject.other | Crystalline Films on Amorphous Substrates | en_US |
| dc.subject.other | Ion-Beam-Enhanced Grain Growth in Thin Films | en_US |
| dc.subject.other | Epitaxy via Surface-Energy-Driven Grain Growth | en_US |
| dc.subject.other | Submicrometer-Period Gold Transmission Gratings for X-Ray Spectroscopy | en_US |
| dc.subject.other | High-Dispersion, High-Efficiency Transmission Gratings for Astrophysical X-Ray Spectroscopy | en_US |
| dc.subject.other | Soft X-Ray Interferometer Gratings | en_US |
| dc.title | Submicron Structures Technology and Research | en_US |
| dc.type | Technical Report | en_US |
