Focused Ion Beam Fabrication
Author(s)
Melngailis, John; Murguia, James E.; Shepard, Mark I.; Musil, Christian R.; Lezec, Henri J.; Zamani, Susan; Ismail, Khalid; Mahoney, Leonard J.; Huh, Jeung-Soo; Swain, Herbert H.; Blauner, Patricia G.; Ro, Jaesang; Butt, Yousaf; Thompson, Carl V.; Dubner, Andrew D.; Wagner, Alfred; Tao, Tao; Xue, Ziling; Kaesz, Herbert D.; ... Show more Show less
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Contains reports on ten research projects.
Date issued
1989-01-01Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_132_01_01s_03
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132