| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Murguia, James E. | en_US |
| dc.contributor.author | Shepard, Mark I. | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Zamani, Susan | en_US |
| dc.contributor.author | Ismail, Khalid | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Huh, Jeung-Soo | en_US |
| dc.contributor.author | Swain, Herbert H. | en_US |
| dc.contributor.author | Blauner, Patricia G. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Butt, Yousaf | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Dubner, Andrew D. | en_US |
| dc.contributor.author | Wagner, Alfred | en_US |
| dc.contributor.author | Tao, Tao | en_US |
| dc.contributor.author | Xue, Ziling | en_US |
| dc.contributor.author | Kaesz, Herbert D. | en_US |
| dc.date.accessioned | 2010-07-16T04:12:11Z | |
| dc.date.available | 2010-07-16T04:12:11Z | |
| dc.date.issued | 1989-01-01 to 1989-12-31 | en_US |
| dc.identifier | RLE_PR_132_01_01s_03 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57123 | |
| dc.description | Contains reports on ten research projects. | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAL03-88-K-0108 | en_US |
| dc.description.sponsorship | Hughes Research Laboratories Fellowship | en_US |
| dc.description.sponsorship | SEMATECH | en_US |
| dc.description.sponsorship | Charles S. Draper Laboratory Contract DL-H-261827 | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAL03-87-K-0126 | en_US |
| dc.description.sponsorship | IBM General Technologies Division | en_US |
| dc.description.sponsorship | IBM Research Division | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1989 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Focused Ion Beam Fabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 132 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Fabrication | en_US |
| dc.subject.other | Development of Focused Ion Beam Implantation | en_US |
| dc.subject.other | Development of Focused Ion Beam Lithography | en_US |
| dc.subject.other | Frequency Tunable Gunn Diodes Fabricated by Focused Ion Beam Implantation | en_US |
| dc.subject.other | NMOS Transistors with Focused Ion Beam Implanted Channel Regions | en_US |
| dc.subject.other | GaAs MESFETs Fabricated with Focused Ion Beam Channel Implants | en_US |
| dc.subject.other | Focused Ion Beam Exposure of Resists | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition of Low Resistivity Gold Structures | en_US |
| dc.subject.other | Fundamental Properties of Ion Induced Deposition | en_US |
| dc.subject.other | In-Situ Measurement of Gas Adsorption | en_US |
| dc.subject.other | In-Situ Measurement of Ion Induced Deposition | en_US |
| dc.subject.other | Focused Ion Beam Induced Deposition of Platinum | en_US |
| dc.title | Focused Ion Beam Fabrication | en_US |
| dc.type | Technical Report | en_US |
