Focused Ion Beam Microfabrication

Author(s)
Melngailis, John; Lezec, Henri J.; Musil, Christian R.; Mahoney, Leonard J.; Chu, Alex; ... Show more
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Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved.
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Description
Contains an introduction, reports on seven research projects and a list of publications.
Date issued
1991-01-01
URI
http://hdl.handle.net/1721.1/57199
Publisher
Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Other identifiers
RLE_PR_134_01_01s_06
Series/Report no.
Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134
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