| dc.contributor.author | Melngailis, John | en_US |
| dc.contributor.author | Lezec, Henri J. | en_US |
| dc.contributor.author | Musil, Christian R. | en_US |
| dc.contributor.author | Mahoney, Leonard J. | en_US |
| dc.contributor.author | Chu, Alex | en_US |
| dc.contributor.author | Chu, Larry | en_US |
| dc.contributor.author | Antoniadis, Dimitri A. | en_US |
| dc.contributor.author | Vignaud, Dominique | en_US |
| dc.contributor.author | Liao, Kenneth S. | en_US |
| dc.contributor.author | Shimase, Akira | en_US |
| dc.contributor.author | Chung, James E. | en_US |
| dc.contributor.author | Etchin, Sergey | en_US |
| dc.contributor.author | Kazior, Thomas E. | en_US |
| dc.contributor.author | Ro, Jaesang | en_US |
| dc.contributor.author | Thompson, Carl V. | en_US |
| dc.contributor.author | Chiang, Tony P. | en_US |
| dc.contributor.author | Chu, William | en_US |
| dc.contributor.author | Smith, Henry I. | en_US |
| dc.contributor.author | Hartney, Mark A. | en_US |
| dc.contributor.author | Shaver, D. C. | en_US |
| dc.contributor.author | Xu, Xin | en_US |
| dc.contributor.author | Della Ratta, Anthony D. | en_US |
| dc.contributor.author | Sosonkina, Jane | en_US |
| dc.date.accessioned | 2010-07-16T04:32:32Z | |
| dc.date.available | 2010-07-16T04:32:32Z | |
| dc.date.issued | 1991-01-01 to 1991-12-31 | en_US |
| dc.identifier | RLE_PR_134_01_01s_06 | en_US |
| dc.identifier.uri | http://hdl.handle.net/1721.1/57199 | |
| dc.description | Contains an introduction, reports on seven research projects and a list of publications. | en_US |
| dc.description.sponsorship | Defense Advanced Research Projects Agency/U.S. Army Research Office Contract DAAL03-88-K-0108 | en_US |
| dc.description.sponsorship | National Science Foundation Grant ECS 89-21728 | en_US |
| dc.description.sponsorship | U.S. Army Research Office Contract DAAL03-87-K-0126 | en_US |
| dc.description.sponsorship | U.S. Navy - Naval Research Laboratory/Micrion Agreement M08774 | en_US |
| dc.description.sponsorship | SEMATECH | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT) | en_US |
| dc.relation.ispartof | Massachusetts Institute of Technology, Research Laboratory of Electronics, Progress Report, January 1 - December 31, 1991 | en_US |
| dc.relation.ispartof | Solid State Physics, Electronics and Optics | en_US |
| dc.relation.ispartof | Materials and Fabrication | en_US |
| dc.relation.ispartof | Focused Ion Beam Microfabrication | en_US |
| dc.relation.ispartofseries | Massachusetts Institute of Technology. Research Laboratory of Electronics. Progress Report, no. 134 | en_US |
| dc.rights | Copyright (c) 2008 by the Massachusetts Institute of Technology. All rights reserved. | en_US |
| dc.subject.other | Focused Ion Beam Microfabrication | en_US |
| dc.subject.other | Tunable Gunn Diodes | en_US |
| dc.subject.other | High Frequency Performance of Tunable Gunn Diodes | en_US |
| dc.subject.other | Applications of Tunable Gunn Diodes | en_US |
| dc.subject.other | Simulation of Tunable Gunn Diodes with Doping Gradients | en_US |
| dc.subject.other | Simulation of MESFETs with Doping Gradients | en_US |
| dc.subject.other | Limited Lateral Straggle of Focused-Ion-Beam Implants | en_US |
| dc.subject.other | Focused Ion Beam Implantation of GaAs MMICs | en_US |
| dc.subject.other | Focused Ion Beam Implantation of Transistor Optimization | en_US |
| dc.subject.other | Ion Induced Deposition of Gold | en_US |
| dc.subject.other | Ion Induced Deposition of Models | en_US |
| dc.subject.other | Ion Induced Deposition of Microstructure | en_US |
| dc.subject.other | Focused Ion Beam Lithography for X-Ray Mask Making | en_US |
| dc.subject.other | Focused Ion Beam for the Repair of X-Ray Masks | en_US |
| dc.title | Focused Ion Beam Microfabrication | en_US |
| dc.type | Technical Report | en_US |
